What's this MEMS

In case you came here in quest of a 2 bedroom flat to rent in Beijing - you're almost there, just go here!

Hello number ! I don't know how you did to find me, but here you are, my small contribution to the ever growing field of Micro- Electro- Mechanical systems or MEMS. My local coordinate in the real world is currently in Singapore at the Nanyang Technological University (NTU), where several MEMS projects are going on... I'm more specifically interested in the optical MEMS or MOEMS, but to be honest I've a lot of interests!
However, do not hope to find here as much stuff... and humor as in my French web page, but as most of my pages are written in Shakespeare's tongue (or something like that :-) I hope this would prove useful to some of you ! And if you want more fun and infos, just start French course :-)
The links are just sorted by category, but you should find the thing you want, and thus avoid some booooring comments :-)

MEMS introduction

MEMS philosophy

MEMS story

MEMS theory

The electrostatic comb actuator

MEMS process

Really thick photoresist: EPON SU-8 processing

Polarization of electrostatic actuators with the schematic of a voltage amplifier

MEMS paper

• Liu H., Chollet F. , "Layout Controlled One-Step Dry Etch and Release of MEMS Using Deep RIE on SOI Wafer", IEEE/ASME Journal of MEMS, vol. 15, no. 3 (2006) : 541- 547
• Chollet F., Hegde G. M., Zhang XM., Liu AQ., Asundi A., "Vibration measurement with a micromachined mirror in a very-short external cavity laser", Sensors and Actuators A, vol. 116, no. 2 (2004) : 232 -240
• Chollet F., Goedgebuer J.-P., Ramantoko G., "Limitations imposed by LiNbO3-integrated optics technology on narrow-linewidth filters based on mode coupling", Optical Engineering, vol. 40, n. 12 (2001) : 2763-2770 [IF : 0.997]
• Chollet F., de Labachelerie M., Fujita H., "Compact evanescent optical switch and attenuator with electromechanical actuation", IEEE J. of Select. Top. in Quant. Electron., vol. 5, n. 1, (1999) : 52-59 [IF : 2.507]
• Chollet F., Goedgebuer J.-P., "Improved LiNbO3 technology for reducing sidelobe asymmetry in mode converter-based wavelength filters", Jpn. J. Appl. Phys. Part 2, vol. 37, n. 8B, (1998) : 979-981
• Gorecki C., Chollet F., Kawakatsu H., Fujita H., "Silicon-based integrated interferometer with phase modulation driven by surface acoustic waves", Optics letters, vol. 22, n. 23, (1997) : 1784-1786
• Chollet F., Goedgebuer J.-P., Porte H., Hamel A., "Electrooptic narrow linewidth wavelength tuning and intensity modulation of an erbium fiber ring laser", IEEE Photonics technology letters, vol. 8, n. 8, (1996) : 1009-1011

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